Charge stabilization and ion trapping under specimen isolation conditions during Sims analysis

Autor:	Woon-Ming Lau, James B. Metson, P. A. W. van der Heide
Rok vydání:	1992
Předmět:	Chemistry Analytical chemistry Specimen Isolation Surfaces and Interfaces General Chemistry Condensed Matter Physics Kinetic energy Electric charge Ion trapping Surfaces Coatings and Films Ion Secondary ion mass spectrometry Ion beam deposition Materials Chemistry Beam (structure)
Zdroj:	Surface and Interface Analysis. 18:262-268
ISSN:	1096-9918 0142-2421
Popis:	Specimen isolation (SI), an extreme form of kinetic energy filtration, has been shown to be an effective tool for controlling the problems of sample charging and molecular interferences often encounted in secondary ion mass spectrometry (SIMS). In this study the mechanisms involved in the charge stabilization, under both positive and negative primary beam bombardment, were examined more closely. This was facilitated by the introduction of a resistor into the SI configuration, allowing for in situ sample potential control, and the use of computer simulations. The formation of low-energy ion traps at the sample surface under extreme SI conditions was also directly recorded, showing good agreement with the computer simulations carried out.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0a154c052a60f5fae2041d7c1f075d48 https://doi.org/10.1002/sia.740180404 Zobrazit plný text záznamu Plný text