Integrated Optomechanical Resonators in Double-Layer Crystalline Silicon Platforms

Autor: Tianren Fan, Amir H. Hosseinnia, Ali A. Eftekhar, Razi Dehghannasiri, Hesam Moradinejad, Ali Adibi
Rok vydání: 2018
Předmět:
Zdroj: 2018 IEEE Photonics Conference (IPC).
DOI: 10.1109/ipcon.2018.8527120
Popis: We report the fabrication of the integrated deformable resonators with strong optomechanical interactions in the double-layer crystalline silicon platforms along with the experimental observation of the sustainable optomechanical oscillations (up to 75 MHz). This enables novel on-chip RF-photonics applications and wide-band high-speed integrated optical switches.
Databáze: OpenAIRE