Study of nano Fe2O3 MOS thick films as ethanol gas sensor

Autor: N K Pawar, G.H. Jain
Rok vydání: 2011
Předmět:
Zdroj: 2011 Fifth International Conference on Sensing Technology.
DOI: 10.1109/icsenst.2011.6136944
Popis: Thick films of AR Grade nano Fe 2 O 3 material with n type semiconducting properties were prepared and tested for their gas sensing performances. Thick films of the materials were prepared by screen printing technique. The gas sensing performance was studied using static gas sensing system. The material was tested for various gases such as CO, CO 2 , NH 3 , Cl 2 , H 2 , LPG, ethanol and H 2 S. The nano Fe 2 O 3 film showed maximum sensitivity to Ethanol gas at 350°C temperature and at 250 ppm concentration with short response time and large recovery time. Physical and structural properties of the films material were studied by TEM, XRD.
Databáze: OpenAIRE