| Popis: |
Molybdenum (Mo) thin film back contact layers for thin film CuIn (1−x) Ga x Se 2 (CIGS) solar cells were deposited onto soda lime glass substrates using a direct current (DC) planar magnetron sputtering deposition technique. Requirements for the Mo thin film as a back contact layer for CIGS solar cells are various. Sheet resistance, contact resistance to the CIGS absorber, optical reflectance, surface morphology, and adhesion to the glass substrate are the most important properties that the Mo thin film back contact layer must satisfy [1]. Experiments were carried out under various combinations of sputtering power and working gas pressure, for it is well known that mechanical, optical, morphological, and electrical property of a sputter-deposited Mo thin film are dependent on these process parameters [2]. |
