Modeling of MOVPE GaAs Growth Assuming Thermodynamic Equilibrium at The Growth Front: (C/sub 2/H/sub 5/)/sub 2/GaCl and AsH/sub 3

Autor:	T.F. Kuech, M. Hierlemann
Rok vydání:	2005
Předmět:	chemistry.chemical_compound Materials science chemistry Impurity Thermodynamic equilibrium Front (oceanography) Electronic engineering Analytical chemistry Metalorganic vapour phase epitaxy Epitaxy Gallium arsenide
Zdroj:	Sixth International Conference Metalorganic Vapor Phase Epitaxy.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::06b0639883a5ab3261ecfb87d0edecf1 https://doi.org/10.1109/movpe.1992.664967 Zobrazit plný text záznamu