Recipe to minimize Te precipitation in CdTe and (Cd,Zn)Te crystals

Autor: J. L. Sepich, P. K. Liao, C. J. Johnson, J. J. Kennedy, J. Ellsworth, H. R. Vydyanath, G. T. Neugebauer, Brian E. Dean
Rok vydání: 1992
Předmět:
Zdroj: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 10:1476
ISSN: 0734-211X
Popis: Using a quasichemical approach, the total native defect concentration and the minimum deviation in stoichiometry have been calculated in CdTe crystals as a function of the Cd pressure at various temperatures. With this knowledge, CdTe and (Cd,Zn)Te wafers have been subjected to postgrowth step annealing treatment under conditions such that the crystals are in equilibrium with a Cd or (Cd,Zn) vapor corresponding to the minimum in deviation from stoichiometry at each annealing temperature. The step annealed CdTe and (Cd,Zn)Te wafers have been examined under infrared microscopy and have shown significant reduction in the concentration of Te precipitates, whereas the unannealed wafers have had numerous Te precipitates distributed throughout the bulk. HgCdTe epitaxial films have been grown on the step annealed CdTe and (Cd,Zn)Te wafers as well as on unannealed wafers from the same boule. Examination of the cross sections of the epitaxial films indicates appearance of Te precipitates in films grown on unanneale...
Databáze: OpenAIRE