Fabrication and characterization of coaxial scanning near-field optical microscopy cantilever sensors
| Autor: | Daniela Bayer, Martin Aeschlimann, B. R. Schaaf, M. Salomo, Egbert Oesterschulze |
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| Rok vydání: | 2010 |
| Předmět: |
Cantilever
Fabrication business.industry chemistry.chemical_element Near and far field Condensed Matter Physics Focused ion beam Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Optics Optical microscope chemistry law Aluminium Microscopy Electrical and Electronic Engineering Coaxial business |
| Zdroj: | Microelectronic Engineering. 87:1540-1542 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2009.11.031 |
| Popis: | A process scheme for the fabrication of scanning near-field optical and force microscopy cantilever sensors with coaxial tips is presented. A hollow fourfold pyramidal tip is used, coated from both sides by 100nm aluminium. Focused Ion Beam milling is performed to structure the tips. First measurements on a model system demonstrate the performance of these sensors. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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