Variation of microtwin content with thickness in cadmium telluride films grown on sapphire by metalorganic chemical vapor deposition

Autor:	M. R. Appleby Woods, H.L. Glass
Rok vydání:	1992
Předmět:	Physics and Astronomy (miscellaneous) Chemistry X-ray crystallography Analytical chemistry Sapphire Macle Mineralogy Chemical vapor deposition Thin film Epitaxy Isotropic etching Cadmium telluride photovoltaics
Zdroj:	Applied Physics Letters. 60:2619-2621
ISSN:	1077-3118 0003-6951
Popis:	X‐ray diffraction was used to measure microtwinning in (111) CdTe epitaxial films grown on (00⋅1) sapphire substrates by metalorganic chemical vapor deposition. The concentration of microtwins is high near the interface but drops off rapidly with distance. For films grown to thicknesses up to ≊10 μm, the microtwin content is constant and relatively low (much less than 1 vol %) away from the interface. For films grown more than ≊10 μm thick there is a substantial increase in the microtwin content. These microtwins are concentrated near the film surface.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::04a9444aac834bf3c153a9dd52bfdee1 https://doi.org/10.1063/1.106899 Zobrazit plný text záznamu