Characterization of SiOxNyHz and SiNyHz using RBS, ERDA and NRA In memoriam Priv.-Doz. Dr. Rainer P.H. Garten

Autor:	Rainer P. H. Garten, Henning Bubert, M. Wielunski
Rok vydání:	1996
Předmět:	Elastic recoil detection Nuclear reaction Nuclear and High Energy Physics Silicon chemistry Hydrogen Nuclear reaction analysis Analytical chemistry chemistry.chemical_element Heavy ion Instrumentation Nitrogen
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 111:115-125
ISSN:	0168-583X
DOI:	10.1016/0168-583x(95)01256-7
Popis:	Rutherford backscattering (RBS) measurements, elastic recoil detection analysis (ERDA) and nuclear reaction analysis (NRA) were applied to determine the composition, the thickness and the density of plasma-deposited SiOxNyHz and SiNyHz layers on silicon substrate. RBS-measurements were carried out with 2.3 MeV 4He-ions in random and channeling geometry to determine the atomic ratios of N Si in the surface layers, and the layer thicknesses. Depth profiling for hydrogen in the samples was performed by means of α-ERDA using 2.3 or 2.9 MeV 4He-ions. In order to determine the atomic ratios of H N , heavy ion elastic recoil detection (HIERDA) using 32 MeV 28Si7+-ions was applied. The oxygen contents were measured using the nuclear reaction 16O(d,p)17O. Depth profiling for nitrogen was also performed by means of NRA using the reaction 14N(d,α)12C. In addition, ellipsometric measurements of the layer thicknesses were utilized to determine the densities in absolute units (atoms/m3 or kg/m3).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::03ca4d394bb3851688d17b62c4ed4b23 https://doi.org/10.1016/0168-583x(95)01256-7 Zobrazit plný text záznamu Full Text from ScienceDirect