Deposition of Multilayers Using Fast Switching Triple Ring Magnetron Cathode

Autor:	B. Cord, O. Keitel, K.-H. Schuller, H. Rohrmann
Rok vydání:	2002
Předmět:	Materials science Argon business.industry Superlattice Krypton chemistry.chemical_element Coercivity Cathode law.invention Nuclear magnetic resonance chemistry Sputtering law Cavity magnetron Optoelectronics business Layer (electronics)
Zdroj:	Transactions of the Magnetics Society of Japan. 2:207-210
ISSN:	1884-6726 1346-7948
DOI:	10.3379/tmjpn2001.2.207
Popis:	Magnetic Co/Pd superlattices have been sputter deposited using special triple concentric ring magnetron cathode. Magnetic layer properties are investigated as function of argon/krypton sputter gas pressure and of Co layer thickness showing maximum coercivity at 0.2 nm Co thickness. Coercivity is approximately linear function of sputter pressure with highest value of 7 kOe at 40μbar Kr. Special software to control sputter time and power allow deposition times of less than 0.1 s for an individual layer of the superlattice. Power ratio dependent co-sputtering of two cathodes enables preparation of stoichiometrically varying TbFeCo layers giving therefore a tool for efficient investigations of magnetic properties on layer composition.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::02bd9492b4c4b6e665ae1a8475180dff https://doi.org/10.3379/tmjpn2001.2.207 Zobrazit plný text záznamu