| Autor: | Nathalie R. E. N. Impens, Etienne F. Vansant |
|---|---|
| Rok vydání: | 1997 |
| Předmět: |
Materials science
Silicon oxynitride Silicon Silica gel Layer by layer Inorganic chemistry chemistry.chemical_element engineering.material Mesoporous silica Condensed Matter Physics Electronic Optical and Magnetic Materials Polysilazane Surface coating chemistry.chemical_compound Chemical engineering Coating chemistry engineering General Materials Science |
| Zdroj: | Interface Science. 5:95-101 |
| ISSN: | 0927-7056 |
| DOI: | 10.1023/a:1008692707123 |
| Popis: | Mesoporous silica gel has been coated with a thin silicon oxynitridefilm via chemical surface coating. In the first part of the synthesis, achemically bound preceramic polysilazane coating is formed layer by layer onthe pore walls at low temperature, using SiCl4 andNH3 as reagents. In the second part of the synthesis, thepolysilazane coated silica gel is pyrolysed, yielding a chemically bound,thin oxynitride coating. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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