Power MEMS—A capacitive vibration-to-electrical energy converter with built-in voltage
| Autor: | Alexander Frey, Ingo Kuehne, Helmut Seidel, Djordje Marinkovic, Gerald Dr. Eckstein |
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| Rok vydání: | 2008 |
| Předmět: |
Engineering
business.industry Capacitive sensing Metals and Alloys Electrical engineering Capacitive power supply Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Power (physics) law.invention Vibration Capacitor Hardware_GENERAL law Boost converter Hardware_INTEGRATEDCIRCUITS Electronic engineering Electrical and Electronic Engineering business Instrumentation Voltage Electronic circuit |
| Zdroj: | Sensors and Actuators A: Physical. 142:263-269 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2007.02.036 |
| Popis: | This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space equations. The charging of the parallel-plate capacitor takes place by utilizing materials with different work functions for the electrodes. Numerical simulations are performed in order to optimize design parameters targeting a maximum output power. The shown Micro-Electro-Mechanical System (MEMS) based capacitive energy converter is able to provide an output power of 4.28 μW at an external vibration with a frequency of 1 kHz and an amplitude of 1.96 m/s2 (0.2 g). A basic electronic circuit for storing the electrical energy is also introduced. Furthermore, a MEMS design and a process flow are presented. |
| Databáze: | OpenAIRE |
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