A chemical micro analysis system for the measurement of pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence
| Autor: | Björn Ekström, Lili Forssén, Peter Norlin, Ove Öhman |
|---|---|
| Rok vydání: | 1998 |
| Předmět: |
Materials science
Optical fiber Fabrication business.industry ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION Metals and Alloys Process (computing) Analytical chemistry Uv absorption Conductivity Condensed Matter Physics Chip Fluorescence Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Volumetric flow rate law Materials Chemistry Optoelectronics Electrical and Electronic Engineering business Instrumentation |
| Zdroj: | Sensors and Actuators B: Chemical. 49:34-39 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/s0925-4005(98)00106-3 |
| Popis: | A miniaturized multisensor system, intended for the simultaneous measurement of six different parameters in a liquid flow, is presented. The system combines a multisensor chip, a micromachined flow-through cell and optical fiber interfaces to monitor pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence. The design and fabrication process for the sensor and flow-cell chips are described as well as the design of the packaging and the optical, electrical and liquid interfaces. Measurement results show that the performance of the system can compete with that of conventional stand-alone sensors. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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