Palladium Surface Modification of Nanocrystalline Sol-Gel Derived Zinc Oxide Thin Films and its Effect on Methane Sensing
| Autor: | P. BHATTACHARYYA, S. MAJI, S. BISWAS, A. SENGUPTA, T. MAJI, H. SAHA |
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| Jazyk: | angličtina |
| Rok vydání: | 2009 |
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| Zdroj: | Sensors & Transducers, Vol 110, Iss 11, Pp 28-46 (2009) |
| ISSN: | 1726-5479 2306-8515 |
| Popis: | Nanocrystalline n-ZnO thin films were deposited on SiO2-coated p-Si substrates by a sol-gel method to fabricate ZnO-based resistive sensors. Two types of sol-gel ZnO based sensor structure, one as deposited and other with surface modified by palladium were investigated for methane sensing. The response magnitude, response time and recovery time were studied in the temperature range of 100-350 °C and at methane concentrations of 0.01 %, 0.05 %, 0.1 %, 0.5 %, 1 % and 1.5 % for both the sensor structure. The Pd modified sol-gel ZnO based sensor was found to provide lower operating temperature (150 °C), lower response (recovery) time, higher response magnitude and higher sensing range for methane compared to its earlier reported unmodified counterpart (250 °C). With Pd modification ZnO was found to sense methane concentration as low as 0.01 % and as high as 1.5 % whereas for unmodified one this range was restricted between 0.1 % to 1.0 %. |
| Databáze: | OpenAIRE |
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