3D nanophotonic materials made with a single step etch mask on inclined planes

Autor: Grishina, D. A., Harteveld, C. A. M., Perez-Vizcaino, J., Woldering, L. A., willem vos
Přispěvatelé: Complex Photonic Systems
Zdroj: Scopus-Elsevier
European Conference on Lasers and Electro-Optics, CLEO 2015
Databáze: OpenAIRE