3D nanophotonic materials made with a single step etch mask on inclined planes
Autor: | Grishina, D. A., Harteveld, C. A. M., Perez-Vizcaino, J., Woldering, L. A., willem vos |
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Přispěvatelé: | Complex Photonic Systems |
Zdroj: | Scopus-Elsevier European Conference on Lasers and Electro-Optics, CLEO 2015 |
Databáze: | OpenAIRE |
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