Coating stress compensation and temporal evolution studies for ion beam sputtered thin films
| Autor: | Ruch, Eric, Völkel, Reinhard, Mende, Mathias, Knobl, Matthias, Shibata, Masatoshi, Chiba, Kazuki, Ahlstrand, David, Middleton, Michael, Stevenson, Ian, Carlie, Nathan, DeGroote Nelson, Jessica |
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| Zdroj: | Proceedings of SPIE; June 2024, Vol. 13021 Issue: 1 p1302109-1302109-9 |
| Databáze: | Supplemental Index |
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