New oxidants for thermal atomic layer etching of Cu
| Autor: | Mohanty, Nihar, Altamirano-Sánchez, Efrain, Panariti, Persi, Hock, Adam S. |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12958 Issue: 1 p129580I-129580I-6, 1166227p |
| Databáze: | Supplemental Index |
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