CDSAXS study of 3D NAND channel hole etch pattern edge effects and etched hole pattern variance
| Autor: | Sendelbach, Matthew J., Schuch, Nivea G., Zhang, Jin, Lan, Tian, Gao, Ying, Sorkhabi, Osman, Lin, Yung-Yi, Li, Maggie, Oak, Dave, Tan, Zhengquan |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p1295539-1295539-9 |
| Databáze: | Supplemental Index |
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