A simulation-based methodology to analyze the impact of edge-length on curvilinear mask accuracy
| Autor: | Liang, Ted, Kim, Seong-Sue, Mishra, Kushlendra, Sharma, Rachit, Bork, Ingo, Zuo, Mary, Zillner, Christof |
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| Zdroj: | Proceedings of SPIE; November 2023, Vol. 12751 Issue: 1 p127511E-127511E-6, 1147606p |
| Databáze: | Supplemental Index |
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