Improving the accuracy and precision of OCD measurement by systematic error correction in self-interference pupil ellipsometry
| Autor: | Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Lee, Seungwoo, Park, Yeeun, Lee, Seungryeol, Chang, Hoonchul, Jung, Jaehwang, Shin, Inho, Jeong, Seoyeon, Lee, Sooyeong, Ahn, Jinwoo, Kim, Taejoong, Jo, Taeyong, Lee, Myungjun |
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| Zdroj: | Proceedings of SPIE; August 2023, Vol. 12618 Issue: 1 p126180B-126180B-18, 12491839p |
| Databáze: | Supplemental Index |
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