Critical dimension measurement: from synchrotron small angle x-ray scattering to industrial optical scatterometry techniques
| Autor: | Robinson, John C., Sendelbach, Matthew J., Choisnet, Timothée, Hammouti, Abdelali, Gagneur, Vincent, Reche, Jérôme, Rademaker, Guido, Freychet, Guillaume, Jullien, Guillaume, Ducote, Julien, Gergaud, Patrice, Le Cunff, Delphine |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124961K-124961K-10, 12371150p |
| Databáze: | Supplemental Index |
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