Next generation imprint equipment for patterning high quality micro-optical elements
| Autor: | Liddle, J. Alexander, Ruiz, Ricardo, Kolli, Vijay Ramya, Kloiber, Fabian, Drieschner, Simon |
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| Zdroj: | Proceedings of SPIE; May 2023, Vol. 12497 Issue: 1 p124970B-124970B-4, 1124735p |
| Databáze: | Supplemental Index |
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