An integrated MEMS thermal emitter with piezoelectric actuation
| Autor: | Zappe, Hans, Piyawattanametha, Wibool, Park, Yong-Hwa, Li, Nanxi, Fong, Andrew Whye Keong, Wang, Huanhuan, Lim, Leh Woon, Tobing, Landobasa Y. M., Chua, Yun Da, Xu, Linfang, Chen, Weiguo, Zhang, Qingxin, Cai, Hong, Wang, Qi Jie, Lee, Lennon Yao Ting |
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| Zdroj: | Proceedings of SPIE; March 2023, Vol. 12434 Issue: 1 p124340T-124340T-5, 1119066p |
| Databáze: | Supplemental Index |
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