Continuous improvement of defectivity rate and CD uniformity in immersion lithography via track co-optimization method
| Autor: | Sanders, Daniel P., Guerrero, Douglas, Nacenta Mendivil, Jorge P., Frolet, Nathalie, Jullian, Karine, May, Michael, Tanaka, Yuji, Royer, Alexis, Harumoto, Masahiko, Tiron, Raluca |
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| Zdroj: | Proceedings of SPIE; July 2022, Vol. 12055 Issue: 1 p120550U-120550U-8, 1084959p |
| Databáze: | Supplemental Index |
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