Vanadium-Related Deep Levels in n-Silicon Detected by Junction Capacitance Waveform Analysis

Autor: Kawahara, Hisatsugu, Okamoto, Yoichi, Tahira, Kenichiro, Morimoto, Jun, Nakashima, Toru Miyakawa
Zdroj: Japanese Journal of Applied Physics; January 1992, Vol. 31 Issue: 1 p87-87, 1p
Abstrakt: Multiexponential (ME-) and spectral analysis (SA-) Deep Level Transient Spectroscopy (DLTS) are made on vanadium-related deep levels in n-silicon. We resolved three traps with large amplitude and three more traps with comparatively small amplitude, VA (?E=0.08 eV, ?=3.2×10-18cm2), VB (?E=0.28 eV, ?=2.6×10-14cm2) and VC (?E=0.24 eV, ?=8.4×10-18cm2). These vanadium-related levels do not have appreciable broadening of the emission rate spectrum.
Databáze: Supplemental Index