Permeabilities of Inorganic Thin Composite (Sio2)1-X(Zno)X Films Prepared by RF-magnetron Sputtering Method

Autor: Kim, Hwamin, Sohn, Sunyoung
Zdroj: ECS Transactions; May 2009, Vol. 19 Issue: 2 p795-802, 8p
Abstrakt: Diatomic inorganic films of SiO2 and ZnO and their composite films were prepared by the RF-magnetron sputtering to investigate their permeabilities. The Ca cells tested in the atmosphere resulting in a gradual progress of transparency in the passivated Ca cells, which was represented by changes of the optical transmission spectrum. Comparing the saturation times for Ca cells to become completely transparent, the protection effects against water vapor were evaluated for various passivation films. The (SiO2)1[?]x(ZnO)x films were found to show a superior protection effect, in this study, we investigate the dependence of the composition ratio on the permeability of the (SiO2)1[?]x(ZnO)x films with a low water vapor transmission rate (WVTR) as a gas barrier layer for flexible displays. And an extremely low WVTR less than 10[?]3 g/m2/day was obtained in the (SiO2)1[?]x(ZnO)x(x=0.5, 0.7, and 0.9 at.%) films with high packing density and polarizability.
Databáze: Supplemental Index