Thin-film coating of vibro-fluidized microparticles via R. F. Magnetron sputtering

Autor: George, Thomas, Dutta, Achyut K., Islam, M. Saif, Hudak, Nicholas J., Garrett, Benjamin S., Zablocki, Mathew, Creazzo, Timothy, Sharkawy, Ahmed, DeLacy, Brendan G., Mirotznik, Mark S.
Zdroj: Proceedings of SPIE; May 2018, Vol. 10639 Issue: 1 p106392M-106392M-19, 10532828p
Databáze: Supplemental Index