Thin-film coating of vibro-fluidized microparticles via R. F. Magnetron sputtering
Autor: | George, Thomas, Dutta, Achyut K., Islam, M. Saif, Hudak, Nicholas J., Garrett, Benjamin S., Zablocki, Mathew, Creazzo, Timothy, Sharkawy, Ahmed, DeLacy, Brendan G., Mirotznik, Mark S. |
---|---|
Zdroj: | Proceedings of SPIE; May 2018, Vol. 10639 Issue: 1 p106392M-106392M-19, 10532828p |
Databáze: | Supplemental Index |
Externí odkaz: |