Using pattern based layout comparison for a quick analysis of design changes
| Autor: | Cain, Jason P., Yuan, Chi-Min, Huang, Lucas, Yang, Legender, Kan, Huan, Zou, Elain, Wan, Qijian, Du, Chunshan, Hu, Xinyi, Liu, Zhengfang |
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| Zdroj: | Proceedings of SPIE; March 2018, Vol. 10588 Issue: 1 p105880X-105880X-6, 952927p |
| Databáze: | Supplemental Index |
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