Pattern optimizing verification of self-align quadruple patterning
| Autor: | Hohle, Christoph K., Gronheid, Roel, Yamato, Masatoshi, Yamada, Kazuki, Oyama, Kenichi, Hara, Arisa, Natori, Sakurako, Yamauchi, Shouhei, Koike, Kyohei, Yaegashi, Hidetami |
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| Zdroj: | Proceedings of SPIE; March 2017, Vol. 10146 Issue: 1 p101461M-101461M-8, 913158p |
| Databáze: | Supplemental Index |
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