Comparison of small angle deflectometric measurements with different apertures down to the sub-millimetre range
Autor: | Qian, Shinan, Idir, Mourad, Cocco, Daniele, Xiao, Tiqiao, Yamauchi, Kazuto, Ehret, Gerd, Quabis, Susanne, Schulz, Michael |
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Zdroj: | Proceedings of SPIE; October 2016, Vol. 9687 Issue: 1 p968702-968702-8 |
Databáze: | Supplemental Index |
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