Investigation of coat-develop track system for placement error of contact hole shrink process
| Autor: | Bencher, Christopher, Cheng, Joy Y., Harumoto, Masahiko, Stokes, Harold, Tanaka, Yuji, Kaneyama, Koji, Pieczulewski, Charles, Asai, Masaya, Servin, Isabelle, Argoud, Maxime, Gharbi, Ahmed, Lapeyre, Celine, Tiron, Raluca, Monget, Cedric |
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| Zdroj: | Proceedings of SPIE; March 2016, Vol. 9777 Issue: 1 p97770O-97770O-7, 879938p |
| Databáze: | Supplemental Index |
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