Optical metrology solutions for 10nm films process control challenges

Autor: Sanchez, Martha I., Ukraintsev, Vladimir A., Mahendrakar, Sridhar, Vaid, Alok, Venkataraman, Kartik, Lenahan, Michael, Seipp, Steven, Fang, Fang, Saxena, Shweta, Hu, Dawei, Yoon, Nam Hee, Song, Da, Camp, Janay, Ren, Zhou
Zdroj: Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97780Z-97780Z-14, 9680235p
Databáze: Supplemental Index