Optical metrology solutions for 10nm films process control challenges
Autor: | Sanchez, Martha I., Ukraintsev, Vladimir A., Mahendrakar, Sridhar, Vaid, Alok, Venkataraman, Kartik, Lenahan, Michael, Seipp, Steven, Fang, Fang, Saxena, Shweta, Hu, Dawei, Yoon, Nam Hee, Song, Da, Camp, Janay, Ren, Zhou |
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Zdroj: | Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97780Z-97780Z-14, 9680235p |
Databáze: | Supplemental Index |
Externí odkaz: |