Optical super-resolution methodology for 3D full field surface profilometry to reconstruction of micro gratings (Withdrawal Notice)
| Autor: | Asundi, Anand K., Fu, Yu, Chen, Liang-Chia, Hoang, Hai Hong, Lin, Shyh-Tsong, Fan, Kuang-Chao, Kulikov, Rodion V. |
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| Zdroj: | Proceedings of SPIE; July 2015, Vol. 9524 Issue: 1 p952421-952421-1 |
| Databáze: | Supplemental Index |
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