Inspection of mechanical and electrical properties of silicon wafers using terahertz tomography and spectroscopy
| Autor: | Anwar, Mehdi F., Crowe, Thomas W., Manzur, Tariq, Arnold, Thomas, Muehleisen, Wolfgang, Schicker, Johannes, Hirschl, Christina |
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| Zdroj: | Proceedings of SPIE; May 2015, Vol. 9483 Issue: 1 p94830W-94830W-6, 853477p |
| Databáze: | Supplemental Index |
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