The analysis method of the DRAM cell pattern hotspot
| Autor: | Cain, Jason P., Sanchez, Martha I., Lee, Kyusun, Lee, Kweonjae, Chang, Jinman, Kim, Taeheon, Han, Daehan, Hong, Aeran, Kim, Yonghyeon, Kang, Jinyoung, Choi, Bumjin, Lee, Joosung, Lee, Jooyoung, Hong, Hyeongsun, Lee, Kyupil, Jin, Gyoyoung |
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| Zdroj: | Proceedings of SPIE; March 2015, Vol. 9424 Issue: 1 p94241D-94241D-7, 848177p |
| Databáze: | Supplemental Index |
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