High temperature piezoresistive @b-SiC-on-SOI pressure sensor with on chip SiC thermistor
| Autor: | Ziermann, R., Berg, J. von, Obermeier, E., Wischmeyer, F., Niemann, E., Moller, H., Eickhoff, M., Krotz, G. |
|---|---|
| Zdroj: | Materials Science and Engineering B: Solid-State Materials for Advanced Technology; 1999, Vol. 61 Issue: 1 p576-578, 3p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|
Full Text from ScienceDirect