Deep silicon etching: current capabilities and future directions
| Autor: | Maher, Mary Ann, Resnick, Paul J., Westerman, Russ, Martinez, Linnell, Pays-Volard, David, Mackenzie, Ken, Lazerand, Thierry |
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| Zdroj: | Proceedings of SPIE; March 2014, Vol. 8973 Issue: 1 p897309-897309-14 |
| Databáze: | Supplemental Index |
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