Nanomanufacturing concerns about measurements made in the SEM II: specimen contamination

Autor: Postek, Michael T., Orji, Ndubuisi George, Postek, Michael T., Vladár, András E., Purushotham, Kavuri P.
Zdroj: Proceedings of SPIE; September 2013, Vol. 8819 Issue: 1 p88190F-88190F-6, 793717p
Databáze: Supplemental Index