Depth profile of chemical species in multiple doped trimethylsilane film on Si(100) surfaces by low energy Arions
| Autor: | Wang, P. W., Bater, S. |
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| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B; 1998, Vol. 141 Issue: 1 p181-186, 6p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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