Defect Control in Thick SOI-Films Produced by Zone Melting Recrystallization
| Autor: | Tillack, Bernd, Hoeppner, K., Richter, H.H., Banisch, R. |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; January 1989, Vol. 6 Issue: 1 p579-584, 6p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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