Activation of Implanted Al and Co-Implanted Al/C or Al/Si in 4H-SiC
| Autor: | Jones, Kenneth A., Zheleva, T.S., Ervin, Matthew H., Shah, Pankaj B., Derenge, Michael A., Gerardi, G.J., Freitas, Jaime A., Vispute, R.D. |
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| Zdroj: | Materials Science Forum; June 2004, Vol. 457 Issue: 1 p929-932, 4p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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