Interaction of deep-ultraviolet laser light with GaAs surfaces in aqueous solutions

Autor: Podlesnik, D. V., Gilgen, H. H., Willner, A. E., Osgood, R. M.
Zdroj: Journal of the Optical Society of America B: Optical Physics; May 1986, Vol. 3 Issue: 5 p775-784, 10p
Abstrakt: We have investigated the surface oxidation of GaAs and subsequent oxide dissolution that is caused by ultraviolet laser light at 257 nm in an aqueous environment. This process has a chemistry distinct from the related process that uses visible light. Further, unique light-guided surface-relief structures result from the ultraviolet chemistry and the ultraviolet optical properties of the semiconductor surface.
Databáze: Supplemental Index