Plasma deposition of thin metal layers in the discharge with a hollow target
| Autor: | Žižka, E. |
|---|---|
| Zdroj: | Czechoslovak Journal of Physics; January 1983, Vol. 33 Issue: 1 p14-21, 8p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|
| Autor: | Žižka, E. |
|---|---|
| Zdroj: | Czechoslovak Journal of Physics; January 1983, Vol. 33 Issue: 1 p14-21, 8p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|
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