Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography

Autor: Hebard, A. F., Eom, C. B., Fleming, R. M., Chabal, Y. J., Muller, A. J., Glarum, S. H., Pietsch, G. J., Haddon, R. C., Mujsce, A. M., Paczkowski, M. A., Kochanski, G. P.
Zdroj: Applied Physics A: Materials Science & Processing; September 1993, Vol. 57 Issue: 3 p299-303, 5p
Abstrakt: The irradiation of sublimed fullerene (C60 and C70) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated C60 retains its fcc crystal structure but with a substantial fraction of the C60 molecules modified with carbonyl (C=O) bonds.
Databáze: Supplemental Index