A General Design Strategy for Block Copolymer DirectedSelf-Assembly Patterning of Integrated Circuits Contact Holes usingan Alphabet Approach.
| Autor: | Yi, He, Bao, Xin-Yu, Tiberio, Richard, Wong, H.-S. Philip |
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| Zdroj: | Nano Letters; Feb2015, Vol. 15 Issue 2, p805-812, 8p |
| Databáze: | Supplemental Index |
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