Structural damage of Si-implanted in the In0.53Ga0.47As thin film.
| Autor: | Roslan, Muhammad Zulkhairi, Berhanuddin, Dilla D., Mohamed, Mohd Ambri, Wee, M.F. Mohd Razip, Larki, Farhad, Majlis, Burhanuddin Yeop |
|---|---|
| Zdroj: | 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014); 2014, p244-247, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|