Design and control of 6-DOF high-precision scan stage with gravity canceller.
| Autor: | Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi, Suzuki, Kazuhiro, Saiki, Kazuaki |
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| Zdroj: | 2014 American Control Conference; 2014, p997-1002, 6p |
| Databáze: | Complementary Index |
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