Observation of antiphase domain boundaries in GaAs on silicon by transmission electron microscopy.

Autor: Posthill, J. B., Tarn, J. C. L., Das, K., Humphreys, T. P., Parikh, N. R.
Předmět:
Zdroj: Applied Physics Letters; 9/26/1988, Vol. 53 Issue 13, p1207, 3p
Abstrakt: Boundaries between different antiphase domains have been unambiguously identified in heteroepitaxial GaAs on silicon substrates by transmission electron microscopy. A simple and reliable method is described for assessing the presence or absence of these domain boundaries in GaAs. The domain size was found to be as small as ∼0.1 μm in GaAs that had been grown on nominal Si(001) in which a buried, implanted oxide had been previously formed. These boundaries are expected to degrade electrical performance and device reliability modify electronic transport and degrade device performance. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index