Digitized Layouts and Impurity Profiles of Integrated Circuit Monoliths Using Particle Induced X-Ray Fluorescence.
| Autor: | Browning, J. S., Mathis, G. L., Salaita, G. N. |
|---|---|
| Zdroj: | IEEE Transactions on Nuclear Science; 1979, Vol. 26 Issue 1, p1392-1394, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|